The influence of high-k passivation layer on breakdown voltage of Schottky AlGaN/GaN HEMTs

被引:38
|
作者
Jebalin, Binola K. [1 ]
Rekh, A. Shobha [1 ]
Prajoon, P. [1 ]
Kumar, N. Mohan [2 ]
Nirmal, D. [1 ]
机构
[1] Karunya Univ, Dept Elect & Commun Engn, Coimbatore, Tamil Nadu, India
[2] SKP Engn Coll, Thiruvannamalai, Tamil Nadu, India
关键词
HEMT; Breakdown voltage; AlGaN; GaN; High-k; Relative permittivity; Passivation; Schottky contact; ENHANCEMENT; SUBSTRATE; DENSITY; MODEL;
D O I
10.1016/j.mejo.2015.04.006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, analysis and optimization of different high-k material in the passivation layer is carried out to improve the breakdown voltage in a Schottky based AlGaN/GaN High Electron Mobility Transistor (HEMT). The enhancement in Off-state breakdown voltage is observed for different high-k dielectric in the passivation layer. The device with L-gd of 1.5 gm and with high-k passivation layer provides a higher Off-state breakdown voltage. A maximum of 380 V is obtained as the Off-state breakdown for high-k ( similar to HfO2) passivation layer and the obtained result is validated using experimental data. The improved drain current and transconductance for the device obtained is 0.51 A/mm and 143 mS/mm respectively. These results show that the Schottky Source Drain contact (SSD) high-k passivated AlGaN/GaN device is suitable for high power application.Schottky
引用
收藏
页码:1387 / 1391
页数:5
相关论文
共 50 条
  • [1] Numerical Analysis of Breakdown Voltage Enhancement in AlGaN/GaN HEMTs With a High-k Passivation Layer
    Hanawa, Hideyuki
    Onodera, Hiraku
    Nakajima, Atsushi
    Horio, Kazushige
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2014, 61 (03) : 769 - 775
  • [2] Effects of Buffer Leakage Current on Breakdown Voltage in AlGaN/GaN HEMTs with a High-k Passivation Layer
    Satoh, Yoshiki
    Hanawa, Hideyuki
    Horio, Kazushige
    [J]. 2016 11TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC), 2016, : 341 - 344
  • [3] Increase in breakdown voltage of AlGaN/GaN HEMTs with a high-k dielectric layer
    Hanawa, Hideyuki
    Horio, Kazushige
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2014, 211 (04): : 784 - 787
  • [4] Mechanism of Breakdown Enhancement in AlGaN/GaN HEMTs Using a High-k Passivation Layer
    Zhao, ShengLei
    Fu, XiaoJun
    Liu, Fan
    Liu, LunCai
    Luo, Jun
    Hu, GangYi
    Ma, XiaoHua
    Zhang, JinCheng
    Hao, Yue
    [J]. 7TH IEEE INTERNATIONAL NANOELECTRONICS CONFERENCE (INEC) 2016, 2016,
  • [5] Analysis of Dependence of Breakdown Voltage on Gate-Drain Distance in AlGaN/GaN HEMTs With High-k Passivation Layer
    Tomita, R.
    Ueda, S.
    Kawada, T.
    Mitsuzono, H.
    Horio, K.
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2021, 68 (04) : 1550 - 1556
  • [6] Effects of buffer leakage current on breakdown characteristics in AlGaN/GaN HEMTs with a high-k passivation layer
    Hanawa, Hideyuki
    Satoh, Yoshiki
    Horio, Kazushige
    [J]. MICROELECTRONIC ENGINEERING, 2015, 147 : 96 - 99
  • [7] TCAD study of high breakdown voltage AlGaN/GaN HEMTs with embedded passivation layer
    Wu, Jianfeng
    Xu, Conghui
    Fan, Yangtao
    Liu, Xingyi
    Zhong, Zhibai
    Yin, Jun
    Zhang, Chunmiao
    Li, Jing
    Kang, Junyong
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2022, 55 (38)
  • [8] Enhancement of Breakdown voltage i n AlGaN/GaN HEMTs: Field Plate Plus High-k Passivation Layer and High Acceptor Density in Buffer Layer
    Kabemura, Toshiki
    Ueda, Shingo
    Kawada, Yuki
    Horio, Kazushige
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2018, 65 (09) : 3848 - 3854
  • [9] Silicon dioxide passivation of AlGaN/GaN HEMTs for high breakdown voltage
    Ha, Min-Woo
    Lee, Seung-Chul
    Park, Joong-Hyun
    Her, Jin-Cherl
    Seo, Kwang-Seok
    Han, Min-Koo
    [J]. PROCEEDINGS OF THE 18TH INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES & ICS, 2006, : 169 - +
  • [10] High breakdown voltage AlGaN/GaN HEMT with high-K/low-K compound passivation
    Du, Jiangfeng
    Chen, Nanting
    Pan, Peilin
    Bai, Zhiyuan
    Li, Liang
    Mo, Jianghui
    Yu, Qi
    [J]. ELECTRONICS LETTERS, 2015, 51 (01) : 104 - U117