ZnO Film Flexible Printed Circuit Board pH Sensor Measurement and Characterization

被引：10
|
作者：
Yang, Po-Hui [1 ]
Chan, Che-Tsung [1 ]
Zhang, Ying-Sheng [1 ]
机构：
[1] Natl Yunlin Univ Sci & Technol, Grad Sch Elect Engn, Touliu 64002, Taiwan
来源：
IEEE ACCESS | 2022年 / 10卷
关键词：
Zinc oxide; II-VI semiconductor materials; Voltage measurement; Sensors; Electrodes; Substrates; Flexible printed circuits; Stability analysis; pH sensor; biosensor; zinc oxide (ZnO); flexible printed circuit board (FPCB); FIELD-EFFECT TRANSISTOR; RUTHENIUM DIOXIDE; FIBER; TEMPERATURE; BIOSENSOR; MECHANISM; PERFORMANCE; NANORODS; XPS;
D O I：
10.1109/ACCESS.2022.3205320
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
An electrochemical zinc oxide (ZnO) pH sensor is proposed and prototyped using a flexible printed circuit board (FPCB). The device is resistant to acidic and alkaline solutions and exhibits excellent electrical conductivity. The sensing film was deposited by radio-frequency sputtering, providing a dense ZnO layer, and (3-aminopropyl)triethoxysilane (APTES) was used to enhance the chemical stability of the ZnO in acidic solutions. The proposed pH sensor has an average sensitivity of 37.52 mV/pH, linearity of 0.995, and a repeatable RSD value of 2.4%. Testing was conducted with Carmody's buffer pH 2-10 and a voltage-time measurement system. The stability of the prototype was determined by the measurement of the drift and hysteresis effects.
引用
收藏
页码：96091 / 96099
页数：9
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