Electronic and sensor applications of semiconductive CVD diamond films

被引：0
|
作者：
Kohn, E [1 ]
Gluche, P [1 ]
机构：
[1] Univ Ulm, Dept Electron Devices & Circuits, D-89069 Ulm, Germany
来源：
PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON DIAMOND MATERIALS | 1998年 / 97卷 / 32期
关键词：
D O I：
暂无
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
The concept and technology of a thermal microheater module based on CVD diamond and as developed in the frame of the German BMBF project "Semiconducting Diamond for Electronic Applications" is discussed. Data on the materials growth, mechanical properties, actuator performance and first steps towards integration with a diamond FET driver are given.
引用
收藏
页码：482 / 490
页数：3
相关论文
共 50 条
  • [1] CVD DIAMOND FILMS FOR ELECTRONIC APPLICATIONS
    IYER, SB
    [J]. METALS MATERIALS AND PROCESSES, 1994, 5 (04): : 259 - 268
  • [2] Applications of conformal CVD diamond films
    Rotter, S
    [J]. ISRAEL JOURNAL OF CHEMISTRY, 1998, 38 (1-2) : 135 - 140
  • [3] Electronic properties of CVD polycrystalline diamond films
    Alvarez, J
    Kleider, JP
    Bergonzo, P
    Brambilla, A
    Tromson, D
    Mer, C
    Guizard, B
    Foulon, F
    [J]. DIAMOND AND RELATED MATERIALS, 2001, 10 (3-7) : 588 - 592
  • [4] CVD diamond films: from growth to applications
    Gicquel, Alix
    Hassouni, Khaled
    Silva, Francois
    Achard, Jocelyn
    [J]. CURRENT APPLIED PHYSICS, 2001, 1 (06) : 479 - 496
  • [5] Undoped CVD diamond films for electrochemical applications
    Mosinska, Lidia
    Fabisiak, Kazimierz
    Paprocki, Kazimierz
    Kowalska, Magdalena
    Popielarski, Pawel
    Szybowicz, Miroslaw
    [J]. ELECTROCHIMICA ACTA, 2013, 104 : 481 - 486
  • [6] Diamond films for electronic applications
    Meykens, K
    Nesladek, M
    Quaeyhaegens, C
    Stals, LM
    [J]. EUROMAT 97 - PROCEEDINGS OF THE 5TH EUROPEAN CONFERENCE ON ADVANCED MATERIALS AND PROCESSES AND APPLICATIONS: MATERIALS, FUNCTIONALITY & DESIGN, VOL 3: SURFACE ENGINEERING AND FUNCTIONAL MATERIALS, 1997, : 421 - 424
  • [7] CVD diamond films for thermal management applications
    Kyatam, Shusmitha
    Mukherjee, Debarati
    Silva, Armindo
    Alves, Luis
    Rotter, Shlomo
    Neto, Miguel
    Oliveira, Filipe
    Silva, Rui
    Neto, Hugo
    Mendes, Joana C.
    [J]. 2019 IEEE INTERNATIONAL CONFERENCE ON MICROWAVES, ANTENNAS, COMMUNICATIONS AND ELECTRONIC SYSTEMS (COMCAS), 2019,
  • [8] Thermoluminescent CVD diamond films for dosimetric applications
    Mazzocchi, S
    Bruzzi, M
    Bucciolini, M
    Cuttone, G
    Guasti, A
    Pini, S
    Pirollo, S
    Sabini, MG
    Sciortino, S
    [J]. PHYSICA MEDICA, 2001, 17 : 45 - 48
  • [9] Post-growth treatments and contact formation on CVD diamond films for electronic applications
    Jany, C
    Foulon, F
    Bergonzo, P
    Marshall, RD
    [J]. DIAMOND AND RELATED MATERIALS, 1998, 7 (07) : 951 - 956
  • [10] The effect of hydrogen on the electronic properties of CVD diamond films
    Looi, HJ
    Whitfield, MD
    Foord, JS
    Jackman, RB
    [J]. THIN SOLID FILMS, 1999, 343 : 623 - 626
12345