Electronic properties of CVD polycrystalline diamond films

被引:5
|
作者
Alvarez, J
Kleider, JP
Bergonzo, P
Brambilla, A
Tromson, D
Mer, C
Guizard, B
Foulon, F
机构
[1] Univ Paris 06, Lab Genie Elect Paris, UMR 8507 CNRS, Ecole Super Elect, F-91192 Gif Sur Yvette, France
[2] Univ Paris 11, Lab Genie Elect Paris, UMR 8507 CNRS, Ecole Super Elect, F-91192 Gif Sur Yvette, France
[3] CEA Saclay, LETI, DEIN, SPE, F-91191 Gif Sur Yvette, France
关键词
polycrystalline diamond; photoconductivity; mobility lifetime; modulated photocurrent;
D O I
10.1016/S0925-9635(00)00537-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Electronic properties of polycrystalline diamond films have been analysed using steady-state photoconductivity under UV (lambda = 190 nm) and red (lambda = 633 nm) illumination. We look at the effect of several post-deposition treatments: annealing in vacuum at 400 degreesC, successive annealing under air and methane or the reverse, and X-ray exposure. These are shown to affect the photoresponses in different manners. Globally, the mobility-lifetime products of samples are found in the range 10(-7)-10(-6) cm(2) V-1 under W illumination, and ratios of photoresponses in W and red are in the range 10(3)-10(5). First results obtained using the modulated photocurrent technique are also presented. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:588 / 592
页数:5
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