Electronic and sensor applications of semiconductive CVD diamond films

被引：0
|
作者：
Kohn, E [1 ]
Gluche, P [1 ]
机构：
[1] Univ Ulm, Dept Electron Devices & Circuits, D-89069 Ulm, Germany
来源：
PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON DIAMOND MATERIALS | 1998年 / 97卷 / 32期
关键词：
D O I：
暂无
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
The concept and technology of a thermal microheater module based on CVD diamond and as developed in the frame of the German BMBF project "Semiconducting Diamond for Electronic Applications" is discussed. Data on the materials growth, mechanical properties, actuator performance and first steps towards integration with a diamond FET driver are given.
引用
收藏
页码：482 / 490
页数：3
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