Integration of a MEMS education curriculum with interdisciplinary research

被引：1
|
作者：
Liu, C
机构：
来源：
PROCEEDINGS OF THE TWELFTH BIENNIAL UNIVERSITY/GOVERNMENT/INDUSTRY MICROELECTRONICS SYMPOSIUM | 1997年
关键词：
D O I：
10.1109/UGIM.1997.616707
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Successful undergraduate education in Micro Electromechanical Systems (MEMS) is vital for the future growth of this area. Unique challenges in MEMS education are discussed, along with proposed solutions. In this paper, we outline a MEMS education plan currently under develop ment at the University of Illinois. The plan contains three steps - introduction to theory, design and fabrication of MEMS devices. In addition, detailed plan for the first-stage design class is discussed. Education and research will be strongly coupled by incorporating active research issues to the classroom environment and through student involvement in hands-on design and fabrication projects.
引用
收藏
页码：137 / 140
页数：4
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