共 50 条
- [4] Special Section on the Dynamics of MEMS and NEMS [J]. JOURNAL OF VIBRATION AND ACOUSTICS-TRANSACTIONS OF THE ASME, 2017, 139 (04):
- [5] Tribological challenges in MEMS/NEMS devices [J]. PROCEEDINGS OF THE ASME/STLE INTERNATIONAL JOINT TRIBOLOGY CONFERENCE, PTS A AND B, 2008, : 857 - 859
- [7] Hybrid Lithography System for MEMS/NEMS [J]. 2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013), 2013, : 304 - 307
- [9] Controlling Casimir forces in MEMS and NEMS [J]. NANO-AND MICROELECTROMECHANICAL SYSTEMS (NEMS AND MEMS) AND MOLECULAR MACHINES, 2003, 741 : 135 - 137