MEMS and NEMS Research for Education

被引:0
|
作者
Husak, M. [1 ]
Jakovenko, J. [1 ]
机构
[1] Czech Tech Univ, Fac Elect Engn, Dept Microelect, Tech 2, CZ-16627 Prague 6, Czech Republic
关键词
Microsystems; education; MEMS; NEMS; smart materials; micro; nano;
D O I
暂无
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Education in the branch of Microsystems is described in the paper. There are methods of education in the connection to research in the core of the paper. Methods are focused on active involvement of students in research work. Research student output are using in educational process. Individual tasks are parts of solutions of large research projects. Individual work contributes to their professional forming. The research in the area of nanoelectronics (MEMS and NEMS) is discussed. Several workplaces are used where students work on defined tasks. The use of special instrument, microscope and other nanotechnology workplaces in the different institutes is necessary. The education involves nanomaterials and smart materials for sensor and smart micro and nanosystems. Knowledges are become during research and individual student research work.
引用
收藏
页码:1057 / +
页数:2
相关论文
共 50 条
  • [1] Origami MEMS and NEMS
    Rogers, John
    Huang, Yonggang
    Schmidt, Oliver G.
    Gracias, David H.
    [J]. MRS BULLETIN, 2016, 41 (02) : 123 - 129
  • [2] Origami MEMS and NEMS
    John Rogers
    Yonggang Huang
    Oliver G. Schmidt
    David H. Gracias
    [J]. MRS Bulletin, 2016, 41 : 123 - 129
  • [3] From MEMS to NEMS with carbon
    Wang, CL
    Madou, M
    [J]. BIOSENSORS & BIOELECTRONICS, 2005, 20 (10): : 2181 - 2187
  • [4] Special Section on the Dynamics of MEMS and NEMS
    Rhoads, Jeffrey F.
    Cho, Hanna
    Judge, John
    Krylov, Slava
    Shaw, Steven W.
    Younis, Mohammad
    [J]. JOURNAL OF VIBRATION AND ACOUSTICS-TRANSACTIONS OF THE ASME, 2017, 139 (04):
  • [5] Tribological challenges in MEMS/NEMS devices
    Patton, Steven T.
    Voevodin, Andrey A.
    [J]. PROCEEDINGS OF THE ASME/STLE INTERNATIONAL JOINT TRIBOLOGY CONFERENCE, PTS A AND B, 2008, : 857 - 859
  • [6] Microfluidics, MEMS/NEMS, Sensors and Devices
    Khosla, Ajit
    Hesketh, Peter J.
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2014, 161 (02) : Y1 - Y1
  • [7] Hybrid Lithography System for MEMS/NEMS
    Chen, Linsen
    Pu, Donglin
    Hu, Jin
    Ye, Yan
    Zhu, Pengfei
    [J]. 2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013), 2013, : 304 - 307
  • [8] Thermoelectric Materials in MEMS and NEMS: A Review
    Roncaglia, Alberto
    Ferri, Matteo
    [J]. SCIENCE OF ADVANCED MATERIALS, 2011, 3 (03) : 401 - 419
  • [9] Controlling Casimir forces in MEMS and NEMS
    Esquivel-Sirvent, R
    Villarreal, C
    [J]. NANO-AND MICROELECTROMECHANICAL SYSTEMS (NEMS AND MEMS) AND MOLECULAR MACHINES, 2003, 741 : 135 - 137
  • [10] The Recent Progress of MEMS/NEMS Resonators
    Wei, Lei
    Kuai, Xuebao
    Bao, Yidi
    Wei, Jiangtao
    Yang, Liangliang
    Song, Peishuai
    Zhang, Mingliang
    Yang, Fuhua
    Wang, Xiaodong
    [J]. MICROMACHINES, 2021, 12 (06)