The Recent Progress of MEMS/NEMS Resonators

被引：52
|
作者：
Wei, Lei [1 ,2 ]
Kuai, Xuebao [1 ,3 ]
Bao, Yidi [1 ,2 ]
Wei, Jiangtao [1 ]
Yang, Liangliang [1 ,2 ]
Song, Peishuai [1 ,2 ]
Zhang, Mingliang [1 ,2 ]
Yang, Fuhua [1 ,2 ,4 ,5 ]
Wang, Xiaodong [1 ,2 ,4 ,5 ]
机构：
[1] Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] Univ Sci & Technol China, Sch Microelect, Hefei 230026, Peoples R China
[4] Beijing Acad Quantum Informat Sci, Beijing 100193, Peoples R China
[5] Beijing Engn Res Ctr Semicond Micro Nano Integrat, Beijing 100083, Peoples R China
来源：
MICROMACHINES | 2021年 / 12卷 / 06期
关键词：
MEMS; NEMS; single; double-clamped resonators; hemispherical shell resonators; ring; microdisk resonators; SAW; BAW resonators; QUARTZ TUNING FORK; MASS-SPECTROMETRY; QUANTUM; MEMS; SYSTEMS; OSCILLATORS; CANTILEVERS; RECOGNITION; SENSORS; PHYSICS;
D O I：
10.3390/mi12060724
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.
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页数：29
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