Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect

被引：0
|
作者：
Xu, F [1 ]
Chu, F [1 ]
Shepard, JF [1 ]
Trolier-McKinstry, S [1 ]
机构：
[1] Penn State Univ, Mat Res Lab, University Pk, PA 16802 USA
来源：
FERROELECTRIC THIN FILMS VI | 1998年 / 493卷
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d(33) values of similar to 5 pC/N, while poled films have values up to 220 pC/N.
引用
收藏
页码：427 / 432
页数：6
相关论文
共 50 条
  • [1] Piezoelectric coefficient measurement of piezoelectric thin films: an overview
    Liu, JM
    Pan, B
    Chan, HLW
    Zhu, SN
    Zhu, YY
    Liu, ZG
    MATERIALS CHEMISTRY AND PHYSICS, 2002, 75 (1-3) : 12 - 18
  • [2] Piezoelectric coefficient measurement of piezoelectric thin films: an overview
    Liu, JM
    Chan, HLW
    Choy, CL
    Liu, ZG
    MECHANICS AND MATERIAL ENGINEERING FOR SCIENCE AND EXPERIMENTS, 2001, : 242 - 246
  • [3] A model for longitudinal piezoelectric coefficient measurement of the aluminum nitride thin films
    Xiaomeng Bi
    Yihui Wu
    Junfeng Wu
    Haiwen Li
    Lianqun Zhou
    Journal of Materials Science: Materials in Electronics, 2014, 25 : 2435 - 2442
  • [4] A model for longitudinal piezoelectric coefficient measurement of the aluminum nitride thin films
    Bi, Xiaomeng
    Wu, Yihui
    Wu, Junfeng
    Li, Haiwen
    Zhou, Lianqun
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2014, 25 (06) : 2435 - 2442
  • [5] Measurement of longitudinal piezoelectric coefficient of thin films by a laser-scanning vibrometer
    Yao, K
    Tay, FEH
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2003, 50 (02) : 113 - 116
  • [6] Electrode size and boundary condition independent measurement of the effective piezoelectric coefficient of thin films
    Stewart, M.
    Lepadatu, S.
    McCartney, L. N.
    Cain, M. G.
    Wright, L.
    Crain, J.
    Newns, D. M.
    Martyna, G. J.
    APL MATERIALS, 2015, 3 (02):
  • [7] A technique for the measurement of d(31) coefficient of piezoelectric thin films
    Shepard, JF
    Moses, PJ
    TrolierMcKinstry, S
    MATERIALS FOR SMART SYSTEMS II, 1997, 459 : 225 - 230
  • [8] Longitudinal piezoelectric coefficient measurement for bulk ceramics and thin films using pneumatic pressure rig
    Xu, F
    Chu, F
    Trolier-McKinstry, S
    JOURNAL OF APPLIED PHYSICS, 1999, 86 (01) : 588 - 594
  • [9] Direct measurement of piezoelectric shear coefficient
    Malakooti, Mohammad H.
    Sodano, Henry A.
    JOURNAL OF APPLIED PHYSICS, 2013, 113 (21)
  • [10] Precise measurement of the transverse piezoelectric coefficient for thin films on anisotropic substrate
    Chun, Doo-Man
    Sato, Masashi
    Kanno, Isaku
    JOURNAL OF APPLIED PHYSICS, 2013, 113 (04)
12345