Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect

被引：0
|
作者：
Xu, F [1 ]
Chu, F [1 ]
Shepard, JF [1 ]
Trolier-McKinstry, S [1 ]
机构：
[1] Penn State Univ, Mat Res Lab, University Pk, PA 16802 USA
来源：
FERROELECTRIC THIN FILMS VI | 1998年 / 493卷
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D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d(33) values of similar to 5 pC/N, while poled films have values up to 220 pC/N.
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页码：427 / 432
页数：6
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