Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect

被引：0

作者：

Xu, F ^{[1
]}

Chu, F ^{[1
]}

Shepard, JF ^{[1
]}

Trolier-McKinstry, S ^{[1
]}

机构：

[1] Penn State Univ, Mat Res Lab, University Pk, PA 16802 USA

来源：

FERROELECTRIC THIN FILMS VI | 1998年 / 493卷

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d(33) values of similar to 5 pC/N, while poled films have values up to 220 pC/N.

引用

页码：427 / 432

页数：6

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