Measurement of longitudinal piezoelectric coefficient of thin films by a laser-scanning vibrometer

被引：119
|
作者：
Yao, K [1 ]
Tay, FEH [1 ]
机构：
[1] Inst Mat Res & Engn, Singapore 117602, Singapore
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2003年 / 50卷 / 02期
关键词：
D O I：
10.1109/TUFFC.2003.1182115
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A laser scanning vibrometer (LSV) was used for the first time to measure the piezoelectric coefficient of ferroelectric thin films based on the converse piezoelectric effect. The significant advantages of the use of the LSV for this purpose were demonstrated. Several key points were discussed in order to achieve reliable and accurate results.
引用
收藏
页码：113 / 116
页数：4
相关论文
共 50 条
  • [1] The laser-scanning confocal vibrometer microscope
    Rembe, C
    Dräbenstedt, A
    OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION IV, PTS 1 AND 2, 2005, 5856 : 698 - 709
  • [2] Visualisation and measurement of acoustic and fluidic phenomena using a laser-scanning vibrometer
    Zipser, L
    Franke, H
    FIFTH INTERNATIONAL CONFERENCE ON VIBRATION MEASUREMENTS BY LASER TECHNIQUES: ADVANCES AND APPLICATIONS, 2002, 4827 : 192 - 198
  • [3] Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect
    Xu, F
    Chu, F
    Shepard, JF
    Trolier-McKinstry, S
    FERROELECTRIC THIN FILMS VI, 1998, 493 : 427 - 432
  • [4] A model for longitudinal piezoelectric coefficient measurement of the aluminum nitride thin films
    Xiaomeng Bi
    Yihui Wu
    Junfeng Wu
    Haiwen Li
    Lianqun Zhou
    Journal of Materials Science: Materials in Electronics, 2014, 25 : 2435 - 2442
  • [5] A model for longitudinal piezoelectric coefficient measurement of the aluminum nitride thin films
    Bi, Xiaomeng
    Wu, Yihui
    Wu, Junfeng
    Li, Haiwen
    Zhou, Lianqun
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2014, 25 (06) : 2435 - 2442
  • [6] Laser-scanning confocal vibrometer microscope:: Theory and experiments
    Rembe, Christian
    Draebenstedt, Alexander
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (08):
  • [7] Piezoelectric coefficient measurement of piezoelectric thin films: an overview
    Liu, JM
    Pan, B
    Chan, HLW
    Zhu, SN
    Zhu, YY
    Liu, ZG
    MATERIALS CHEMISTRY AND PHYSICS, 2002, 75 (1-3) : 12 - 18
  • [8] Piezoelectric coefficient measurement of piezoelectric thin films: an overview
    Liu, JM
    Chan, HLW
    Choy, CL
    Liu, ZG
    MECHANICS AND MATERIAL ENGINEERING FOR SCIENCE AND EXPERIMENTS, 2001, : 242 - 246
  • [9] Analysis of vibration behaviour and defects with the laser-scanning vibrometer
    Zipser, L
    Franke, H
    IMAC - PROCEEDINGS OF THE 17TH INTERNATIONAL MODAL ANALYSIS CONFERENCE, VOLS I AND II, 1999, 3727 : 674 - 679
  • [10] Lateral resolution limit of the laser-scanning confocal vibrometer microscope
    Rembe, Christian
    SEVENTH INTERNATIONAL CONFERENCE ON VIBRATION MEASUREMENTS BY LASER TECHNIQUES: ADVANCES AND APPLICATIONS, 2006, 6345
12345