Microelectromechanical systems (MEMS)

被引：0
|
作者：
Gabriel, KJ
机构：
来源：
1997 IEEE AEROSPACE CONFERENCE PROCEEDINGS, VOL 3 | 1997年
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中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
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页码：9 / 43
页数：35
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