Microelectromechanical systems (MEMS) tutorial

被引：4

作者：

Gabriel, KJ ^{[1
]}

机构：

[1] Carnegie Mellon Univ, Inst Robot, Pittsburgh, PA 15213 USA

来源：

关键词：

D O I：

10.1109/TEST.1998.743183

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：432 / 441

页数：10

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