Testing requirements for microelectromechanical systems (MEMS)

被引：2
|
作者：
Salmon, LG [1 ]
机构：
[1] Brigham Young Univ, Dept Elect & Comp Engn, Provo, UT 84602 USA
来源：
1998 IEEE AUTOTESTCON PROCEEDINGS - IEEE SYSTEMS READINESS TECHNOLOGY CONFERENCE | 1998年
关键词：
D O I：
10.1109/AUTEST.1998.713436
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
引用
收藏
页码：160 / 160
页数：1
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