INTEGRATED FERROELECTRIC MICROELECTROMECHANICAL SYSTEMS (MEMS)

被引：61
|
作者：
POLLA, DL
SCHILLER, PJ
机构：
[1] Department of Electrical Engineering, Center for Microelectromechanical Systems, University of Minnesota, Minneapolis, Minnesota 55455
来源：
INTEGRATED FERROELECTRICS | 1995年 / 7卷 / 1-4期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1080/10584589508220246
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A ferroelectric test chip has been fabricated consisting of 1) piezoelectric (PZT) microsensors (accelerometers), 2) low-voltage, 3-mu m, n-well CMOS signal conditioning electronics, 3) high-voltage (HVMOS) drive electronics, and 4) PZT microactuator diaphragms and cantilevers. This test chip has been developed to address processing problems encountered in the fabrication of integrated ferroelectric microelectromechanical systems (FMEMS). A description fabrication, IC-compatible process integration, electrical performance of diagnostic MEMS circuits and devices is presented.
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页码：359 / 370
页数：12
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