INTEGRATED FERROELECTRIC MICROELECTROMECHANICAL SYSTEMS (MEMS)

被引：61
|
作者：
POLLA, DL
SCHILLER, PJ
机构：
[1] Department of Electrical Engineering, Center for Microelectromechanical Systems, University of Minnesota, Minneapolis, Minnesota 55455
来源：
INTEGRATED FERROELECTRICS | 1995年 / 7卷 / 1-4期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1080/10584589508220246
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A ferroelectric test chip has been fabricated consisting of 1) piezoelectric (PZT) microsensors (accelerometers), 2) low-voltage, 3-mu m, n-well CMOS signal conditioning electronics, 3) high-voltage (HVMOS) drive electronics, and 4) PZT microactuator diaphragms and cantilevers. This test chip has been developed to address processing problems encountered in the fabrication of integrated ferroelectric microelectromechanical systems (FMEMS). A description fabrication, IC-compatible process integration, electrical performance of diagnostic MEMS circuits and devices is presented.
引用
收藏
页码：359 / 370
页数：12
相关论文
共 50 条
  • [31] Parametrically excited microelectromechanical systems (MEMS) [Parametererregte mikroelektromechanische Systeme (MEMS)]
    Kniffka T.J.
    Ecker H.
    [J]. e & i Elektrotechnik und Informationstechnik, 2015, 132 (8) : 456 - 461
  • [32] Microsensors, microelectromechanical systems (MEMS), and electronics for smart structures and systems
    Varadan, VK
    Varadan, VV
    [J]. SMART MATERIALS AND STRUCTURES, 2000, 9 (06) : 953 - 972
  • [33] Integrated microelectromechanical systems in conventional CMOS
    Fedder, GK
    [J]. ISCAS '97 - PROCEEDINGS OF 1997 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOLS I - IV: CIRCUITS AND SYSTEMS IN THE INFORMATION AGE, 1997, : 2821 - 2824
  • [34] Reconfigurable hydrophobic/hydrophilic surfaces in microelectromechanical systems (MEMS)
    Deval, J
    Umali, TA
    Lan, EH
    Dunn, B
    Ho, CM
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (01) : 91 - 95
  • [35] U-sequence in electrostatic microelectromechanical systems (MEMS)
    De, Sudipto K.
    Aluru, N. R.
    [J]. PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2006, 462 (2075): : 3435 - 3464
  • [36] The Future is MEMS Design Considerations of Microelectromechanical Systems at Bosch
    Schwarz, Mike
    Franz, Jochen
    Reimann, Mathias
    [J]. 2015 22ND INTERNATIONAL CONFERENCE MIXED DESIGN OF INTEGRATED CIRCUITS & SYSTEMS (MIXDES), 2015, : 177 - 180
  • [37] Total dose effects on microelectromechanical systems (MEMS): Accelerometers
    Lee, CI
    Johnston, AH
    Tang, WC
    Barnes, CE
    Lyke, J
    [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1996, 43 (06) : 3127 - 3132
  • [38] Micromachines - An Open Access Journal on Microelectromechanical Systems (MEMS)
    Elwenspoek, Miko
    [J]. MICROMACHINES, 2010, 1 (02): : 34 - 35
  • [39] Development of Microelectromechanical Systems (MEMS) forceps for intraocular surgery
    Bhisitkul, RB
    Keller, CG
    [J]. BRITISH JOURNAL OF OPHTHALMOLOGY, 2005, 89 (12) : 1586 - 1588
  • [40] Embedded microelectromechanical systems (MEMS) for measuring strain in composites
    Hautamaki, C
    Zurn, S
    Mantell, SC
    Polla, DL
    [J]. JOURNAL OF REINFORCED PLASTICS AND COMPOSITES, 2000, 19 (04) : 268 - 277
12345