Microelectromechanical systems (MEMS)

被引：0
|
作者：
Gabriel, KJ
机构：
来源：
1997 IEEE AEROSPACE CONFERENCE PROCEEDINGS, VOL 3 | 1997年
关键词：
D O I：
暂无
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
引用
收藏
页码：9 / 43
页数：35
相关论文
共 50 条
  • [21] Microelectromechanical systems (MEMS): fabrication, design and applications
    Judy, JW
    [J]. SMART MATERIALS AND STRUCTURES, 2001, 10 (06) : 1115 - 1134
  • [22] Challenges in interconnection and packaging of microelectromechanical systems (MEMS)
    Ramesham, R
    Ghaffarian, R
    [J]. 50TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE - 2000 PROCEEDINGS, 2000, : 666 - 675
  • [23] Introduction to applications and industries for microelectromechanical systems (MEMS)
    Walraven, JA
    [J]. INTERNATIONAL TEST CONFERENCE 2003, PROCEEDINGS, 2003, : 674 - 680
  • [24] Modeling of wet stiction in microelectromechanical systems (MEMS)
    Hariri, Alireza
    Zu, Jean
    Ben Mrad, Ridha
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (05) : 1276 - 1285
  • [25] Solder bonding for microelectromechanical systems (MEMS) applications
    Goyal, A
    Tadigadapa, S
    Islam, R
    [J]. RELIABILITY, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS II, 2003, 4980 : 281 - 288
  • [26] Parametrically excited microelectromechanical systems (MEMS) [Parametererregte mikroelektromechanische Systeme (MEMS)]
    Kniffka T.J.
    Ecker H.
    [J]. e & i Elektrotechnik und Informationstechnik, 2015, 132 (8) : 456 - 461
  • [27] Microsensors, microelectromechanical systems (MEMS), and electronics for smart structures and systems
    Varadan, VK
    Varadan, VV
    [J]. SMART MATERIALS AND STRUCTURES, 2000, 9 (06) : 953 - 972
  • [28] Total dose effects on microelectromechanical systems (MEMS): Accelerometers
    Lee, CI
    Johnston, AH
    Tang, WC
    Barnes, CE
    Lyke, J
    [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1996, 43 (06) : 3127 - 3132
  • [29] The Future is MEMS Design Considerations of Microelectromechanical Systems at Bosch
    Schwarz, Mike
    Franz, Jochen
    Reimann, Mathias
    [J]. 2015 22ND INTERNATIONAL CONFERENCE MIXED DESIGN OF INTEGRATED CIRCUITS & SYSTEMS (MIXDES), 2015, : 177 - 180
  • [30] U-sequence in electrostatic microelectromechanical systems (MEMS)
    De, Sudipto K.
    Aluru, N. R.
    [J]. PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2006, 462 (2075): : 3435 - 3464
12345