Towards 100 nm Resolution X-Ray Tomography

被引：2
|
作者：
Bruyndonckx, P.
Sasov, A.
Pauwels, B.
Liu, X.
机构：
来源：
2009 IEEE NUCLEAR SCIENCE SYMPOSIUM CONFERENCE RECORD, VOLS 1-5 | 2009年
关键词：
D O I：
10.1109/NSSMIC.2009.5402349
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Using a nano-focus x-ray source we have been able to visualize structures down to 150 nm in x-ray projection images. Because of their unlimited depth of focus, these sources don't restrict the specimen size in case of 3D tomographic imaging. Simulation studies have shown that optimization of the detector response curve and switching from a reflective x-ray target to a transmission target might allow us to reach sub-100 nm resolutions.
引用
收藏
页码：1335 / 1338
页数：4
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