Towards 100 nm Resolution X-Ray Tomography

被引：2
|
作者：
Bruyndonckx, P.
Sasov, A.
Pauwels, B.
Liu, X.
机构：
来源：
2009 IEEE NUCLEAR SCIENCE SYMPOSIUM CONFERENCE RECORD, VOLS 1-5 | 2009年
关键词：
D O I：
10.1109/NSSMIC.2009.5402349
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Using a nano-focus x-ray source we have been able to visualize structures down to 150 nm in x-ray projection images. Because of their unlimited depth of focus, these sources don't restrict the specimen size in case of 3D tomographic imaging. Simulation studies have shown that optimization of the detector response curve and switching from a reflective x-ray target to a transmission target might allow us to reach sub-100 nm resolutions.
引用
收藏
页码：1335 / 1338
页数：4
相关论文
共 50 条
  • [41] A 30 nm-resolution hard X-ray microscope with X-ray fluorescence mapping capability at BSRF
    Yuan, Qingxi
    Zhang, Kai
    Hong, Youli
    Huang, Wanxia
    Gao, Kun
    Wang, Zhili
    Zhu, Peiping
    Gelb, Jeff
    Tkachuk, Andrei
    Hornberger, Benjamin
    Feser, Michael
    Yun, Wenbing
    Wu, Ziyu
    JOURNAL OF SYNCHROTRON RADIATION, 2012, 19 : 1021 - 1028
  • [42] Switchable resolution in soft x-ray tomography of single cells
    Weinhardt, Venera
    Chen, Jian-Hua
    Ekman, Axel A.
    Guo, Jessica
    Remesh, Soumya G.
    Hammel, Michal
    McDermott, Gerry
    Chao, Weilun
    Oh, Sharon
    Le Gros, Mark A.
    Larabell, Carolyn A.
    PLOS ONE, 2020, 15 (01):
  • [43] High-resolution X-ray computed tomography of impactites
    Koeberl, C
    Denison, C
    Ketcham, RA
    Reimold, WU
    JOURNAL OF GEOPHYSICAL RESEARCH-PLANETS, 2002, 107 (E10)
  • [44] Nanobeam X-ray fluorescence and diffraction computed tomography on human bone with a resolution better than 120 nm
    Palle, Jonas
    Wittig, Nina Kolln
    Kubec, Adam
    Niese, Sven
    Rosenthal, Martin
    Burghammer, Manfred
    Grunewald, Tilman A.
    Birkedal, Henrik
    JOURNAL OF STRUCTURAL BIOLOGY, 2020, 212 (03)
  • [45] Recent trends in high-resolution X-ray tomography
    Mueller, Bert
    DEVELOPMENTS IN X-RAY TOMOGRAPHY XI, 2017, 10391
  • [46] Sub-100-nm-resolution zone plate soft X-ray microscope using undulator radiation
    Kagoshima, Yasushi, 1600, (32):
  • [47] High-resolution x-ray luminescence computed tomography
    Lun, Michael C.
    Li, Changqing
    MEDICAL IMAGING 2020: BIOMEDICAL APPLICATIONS IN MOLECULAR, STRUCTURAL, AND FUNCTIONAL IMAGING, 2021, 11317
  • [48] Sub-100-nm-resolution zone plate soft X-ray microscope using undulator radiation
    Kagoshima, Yasushi
    Wang, Jidong
    Ando, Masami
    Aoki, Sadao
    Anderson, Erik
    Attwood, David
    Kern, Dieter
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1993, 32 (07): : 3332 - 3333
  • [49] THE INCREASE OF SPATIAL-RESOLUTION OF THE X-RAY COMPUTING TOMOGRAPHY
    VAINBERG, EI
    FAINGOIZ, ML
    DOKLADY AKADEMII NAUK SSSR, 1986, 286 (04): : 875 - 878
  • [50] Application of x-ray lithography to 100-nm LSI fabrications
    2001, Nippon Telegraph and Telephone Corp. (50):
12345