Towards 100 nm Resolution X-Ray Tomography

被引:2
|
作者
Bruyndonckx, P.
Sasov, A.
Pauwels, B.
Liu, X.
机构
关键词
D O I
10.1109/NSSMIC.2009.5402349
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Using a nano-focus x-ray source we have been able to visualize structures down to 150 nm in x-ray projection images. Because of their unlimited depth of focus, these sources don't restrict the specimen size in case of 3D tomographic imaging. Simulation studies have shown that optimization of the detector response curve and switching from a reflective x-ray target to a transmission target might allow us to reach sub-100 nm resolutions.
引用
收藏
页码:1335 / 1338
页数:4
相关论文
共 50 条
  • [1] Design study of hard X-ray tomography system to obtain a spatial resolution of 100 nm
    Chon, Kwon Su
    Juhng, Seon Kwan
    Yoon, Kwon-Ha
    CURRENT APPLIED PHYSICS, 2012, 12 (01) : 134 - 140
  • [2] A hard x-ray KB-FZP microscope for tomography with sub-100-nm resolution
    Rau, C.
    Crecea, V.
    Richter, C. -P.
    Peterson, K. M.
    Jemian, P. R.
    Neuhaeusler, U.
    Schneider, G.
    Yu, X.
    Braun, P. V.
    Chiang, T. -C.
    Robinson, I. K.
    DEVELOPMENTS IN X-RAY TOMOGRAPHY V, 2006, 6318
  • [3] X-ray tomography of a microhabitat of bacteria and other soil colloids with sub-100 nm resolution
    Thieme, J
    Schneider, G
    Knöchel, C
    MICRON, 2003, 34 (6-7) : 339 - 344
  • [4] Towards sub-100-nm X-ray microscopy for tomographic applications
    Bruyndonckx, P.
    Sasov, A.
    Pauwels, B.
    POWDER DIFFRACTION, 2010, 25 (02) : 157 - 160
  • [5] Resolution for radar and x-ray tomography
    Natterer, F
    Cheney, M
    Borden, B
    INVERSE PROBLEMS, 2003, 19 (06) : S55 - S63
  • [6] Sub-100 nm resolution 3-D Tomography of CZTSe Using Transmission X-ray Microscopy
    Pruzan, D. S.
    Caruso, A. E.
    Liu, Y.
    Lin, Y.
    Beall, C.
    Repins, I.
    Toney, M. F.
    Scarpulla, M. A.
    2015 IEEE 42ND PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC), 2015,
  • [7] ULTRAHIGH-RESOLUTION X-RAY TOMOGRAPHY
    HADDAD, WS
    MCNULTY, I
    TREBES, JE
    ANDERSON, EH
    LEVESQUE, RA
    YANG, L
    SCIENCE, 1994, 266 (5188) : 1213 - 1215
  • [8] High Resolution X-ray phase tomography
    Peele, Andrew G.
    Thomas, C. David L.
    Clement, John G.
    Arhatari, Benedicta. D.
    Hannah, Kevin M.
    Doshi, Chandni
    Putkunz, Corey T.
    Clark, Jesse N.
    DEVELOPMENTS IN X-RAY TOMOGRAPHY VII, 2010, 7804
  • [9] X-ray tomography with micrometer spatial resolution
    Raven, C
    Snigirev, A
    Koch, A
    Snigireva, I
    Kohn, V
    DEVELOPMENTS IN X-RAY TOMOGRAPHY, 1997, 3149 : 140 - 148
  • [10] High spatial resolution x-ray luminescence computed tomography and x-ray fluorescence computed tomography
    Dai, Xianjin
    Sivasubramanian, Kathyayini
    Xing, Lei
    MOLECULAR-GUIDED SURGERY: MOLECULES, DEVICES, AND APPLICATIONS V, 2019, 10862