Design study of hard X-ray tomography system to obtain a spatial resolution of 100 nm

被引：3
|
作者：
Chon, Kwon Su [2 ]
Juhng, Seon Kwan [3 ]
Yoon, Kwon-Ha [1 ]
机构：
[1] Radiat Imaging Technol Ctr, Iksan 570802, Jeonbuk, South Korea
[2] Catholic Univ Daegu, Dept Radiol Sci, Gyongsan 712702, Gyeongbuk, South Korea
[3] Wonkwang Univ, Inst Radiol Imaging Sci, Iksan 570749, Jeonbuk, South Korea
来源：
CURRENT APPLIED PHYSICS | 2012年 / 12卷 / 01期
基金：
新加坡国家研究基金会;
关键词：
X-ray tomography system; X-ray optics; Spatial resolution; COMPUTED-TOMOGRAPHY; ZONE PLATES; MICROSCOPY; TRANSMISSION;
D O I：
10.1016/j.cap.2011.05.010
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An optic-based X-ray tomography system of a high spatial resolution using a conventional X-ray tube was proposed. The system had several X-ray optics: multilayer mirror for monochromatic X-ray, capillary optic for focusing X-ray onto a sample, and objective zone plate. The X-ray tomography system was designed for obtaining a spatial resolution of 100 nm. Design parameters for each optic were determined and optimized by ray tracing in considering X-ray intensity and reflectivity. The X-ray tomography system with a spatial resolution of 100 nm will provide a good inspect tool in bio-medical field and semiconductor applications. Crown Copyright (C) 2011 Published by Elsevier B. V. All rights reserved.
引用
收藏
页码：134 / 140
页数：7
相关论文
共 50 条
  • [1] Towards 100 nm Resolution X-Ray Tomography
    Bruyndonckx, P.
    Sasov, A.
    Pauwels, B.
    Liu, X.
    2009 IEEE NUCLEAR SCIENCE SYMPOSIUM CONFERENCE RECORD, VOLS 1-5, 2009, : 1335 - 1338
  • [2] Hard x-ray microscopy with a 130 nm spatial resolution
    Youn, HS
    Baik, SY
    Chang, CH
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (02): : 023702 - 1
  • [3] Conceptual design for a beamline for a hard x-ray nanoprobe with 30 nm spatial resolution
    Maser, J
    Stephenson, GB
    Shu, D
    Lai, B
    Vogt, S
    Khounsary, A
    Li, Y
    Benson, C
    Schneider, G
    SYNCHROTRON RADIATION INSTRUMENTATION, 2004, 705 : 470 - 473
  • [4] A hard x-ray KB-FZP microscope for tomography with sub-100-nm resolution
    Rau, C.
    Crecea, V.
    Richter, C. -P.
    Peterson, K. M.
    Jemian, P. R.
    Neuhaeusler, U.
    Schneider, G.
    Yu, X.
    Braun, P. V.
    Chiang, T. -C.
    Robinson, I. K.
    DEVELOPMENTS IN X-RAY TOMOGRAPHY V, 2006, 6318
  • [5] Hard X-ray microscopy with sub 30 nm spatial resolution
    Tang, Mau-Tsu
    Song, Yen-Fang
    Yin, Gung-Chian
    Chen, Fu-Rong
    Chen, Jian-Hua
    Chen, Yi-Ming
    Liang, Keng S.
    Duewer, F.
    Yun, Wenbing
    SYNCHROTRON RADIATION INSTRUMENTATION, PTS 1 AND 2, 2007, 879 : 1274 - +
  • [6] X-ray tomography with micrometer spatial resolution
    Raven, C
    Snigirev, A
    Koch, A
    Snigireva, I
    Kohn, V
    DEVELOPMENTS IN X-RAY TOMOGRAPHY, 1997, 3149 : 140 - 148
  • [7] Optimizing contrast and spatial resolution in hard x-ray tomography of medically relevant tissues
    Rodgers, Griffin
    Schulz, Georg
    Deyhle, Hans
    Kuo, Willy
    Rau, Christoph
    Weitkamp, Timm
    Mueller, Bert
    APPLIED PHYSICS LETTERS, 2020, 116 (02)
  • [8] Hard X-ray diffraction scanning tomography with sub-micrometer spatial resolution
    Palancher, Herve
    Tucoulou, Remi
    Bleuet, Pierre
    Welcomme, Eleonore
    Bonnin, Anne
    Cloetens, Peter
    ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 2010, 66 : S100 - S100
  • [9] Spatial resolution of a hard x-ray CCD detector
    Seely, John F.
    Pereira, Nino R.
    Weber, Bruce V.
    Schumer, Joseph W.
    Apruzese, John P.
    Hudson, Lawrence T.
    Szabo, Csilla I.
    Boyer, Craig N.
    Skirlo, Scott
    APPLIED OPTICS, 2010, 49 (23) : 4372 - 4378
  • [10] High spatial resolution x-ray luminescence computed tomography and x-ray fluorescence computed tomography
    Dai, Xianjin
    Sivasubramanian, Kathyayini
    Xing, Lei
    MOLECULAR-GUIDED SURGERY: MOLECULES, DEVICES, AND APPLICATIONS V, 2019, 10862
12345