Design study of hard X-ray tomography system to obtain a spatial resolution of 100 nm

被引：3
|
作者：
Chon, Kwon Su [2 ]
Juhng, Seon Kwan [3 ]
Yoon, Kwon-Ha [1 ]
机构：
[1] Radiat Imaging Technol Ctr, Iksan 570802, Jeonbuk, South Korea
[2] Catholic Univ Daegu, Dept Radiol Sci, Gyongsan 712702, Gyeongbuk, South Korea
[3] Wonkwang Univ, Inst Radiol Imaging Sci, Iksan 570749, Jeonbuk, South Korea
来源：
CURRENT APPLIED PHYSICS | 2012年 / 12卷 / 01期
基金：
新加坡国家研究基金会;
关键词：
X-ray tomography system; X-ray optics; Spatial resolution; COMPUTED-TOMOGRAPHY; ZONE PLATES; MICROSCOPY; TRANSMISSION;
D O I：
10.1016/j.cap.2011.05.010
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An optic-based X-ray tomography system of a high spatial resolution using a conventional X-ray tube was proposed. The system had several X-ray optics: multilayer mirror for monochromatic X-ray, capillary optic for focusing X-ray onto a sample, and objective zone plate. The X-ray tomography system was designed for obtaining a spatial resolution of 100 nm. Design parameters for each optic were determined and optimized by ray tracing in considering X-ray intensity and reflectivity. The X-ray tomography system with a spatial resolution of 100 nm will provide a good inspect tool in bio-medical field and semiconductor applications. Crown Copyright (C) 2011 Published by Elsevier B. V. All rights reserved.
引用
收藏
页码：134 / 140
页数：7
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