Design study of hard X-ray tomography system to obtain a spatial resolution of 100 nm

被引：3

作者：

Chon, Kwon Su ^{[2
]}

Juhng, Seon Kwan ^{[3
]}

Yoon, Kwon-Ha ^{[1
]}

机构：

[1] Radiat Imaging Technol Ctr, Iksan 570802, Jeonbuk, South Korea

[2] Catholic Univ Daegu, Dept Radiol Sci, Gyongsan 712702, Gyeongbuk, South Korea

[3] Wonkwang Univ, Inst Radiol Imaging Sci, Iksan 570749, Jeonbuk, South Korea

来源：

CURRENT APPLIED PHYSICS | 2012年 / 12卷 / 01期

基金：

新加坡国家研究基金会;

关键词：

X-ray tomography system; X-ray optics; Spatial resolution; COMPUTED-TOMOGRAPHY; ZONE PLATES; MICROSCOPY; TRANSMISSION;

D O I：

10.1016/j.cap.2011.05.010

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An optic-based X-ray tomography system of a high spatial resolution using a conventional X-ray tube was proposed. The system had several X-ray optics: multilayer mirror for monochromatic X-ray, capillary optic for focusing X-ray onto a sample, and objective zone plate. The X-ray tomography system was designed for obtaining a spatial resolution of 100 nm. Design parameters for each optic were determined and optimized by ray tracing in considering X-ray intensity and reflectivity. The X-ray tomography system with a spatial resolution of 100 nm will provide a good inspect tool in bio-medical field and semiconductor applications. Crown Copyright (C) 2011 Published by Elsevier B. V. All rights reserved.

引用

页码：134 / 140

页数：7

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