Model description and parameter extraction of on-chip spiral inductors for MMICs

被引：8
|
作者：
Yin, WY [1 ]
Pan, SJ
Li, LW
Gan, YB
机构：
[1] Natl Univ Singapore, Temasek Labs, Singapore 119260, Singapore
[2] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 119260, Singapore
来源：
INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING | 2004年 / 14卷 / 02期
关键词：
on-chip inductors; inductance; Q-factor; self-resonance frequency; FMI; local scalable formulas;
D O I：
10.1002/mmce.10123
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
A statistical description of the global performance of on-chip spiral inductors, based on extensive measurement is presented. These inductors were fabricated with different turn numbers or track lengths/track widths, but with the same spacing. From the S parameters measured using a de-embedding technique, the inductance L, Q factor, self-resonance frequency, and figure-of-merit indicator (FMI) of these inductors are determined. Various local scalable formulas are obtained in order to describe the features of these inductors. Based on extensive parametric studies, certain ways to improve these inductor performances can be found. (C) 2004 Wiley Periodicals, Inc.
引用
收藏
页码：111 / 121
页数：11
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