共 50 条
- [41] Wafer-level 3D interconnects via Cu bonding ADVANCED METALLIZATION CONFERENCE 2004 (AMC 2004), 2004, : 125 - 130
- [44] Metal Thermocompression Wafer Bonding for 3D Integration and MEMS Applications SEMICONDUCTOR WAFER BONDING 11: SCIENCE, TECHNOLOGY, AND APPLICATIONS - IN HONOR OF ULRICH GOSELE, 2010, 33 (04): : 27 - 35
- [45] Bonding Technologies for Chip Level and Wafer Level 3D integration 2014 IEEE 64TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2014, : 647 - 654
- [46] High Precision Alignment Process for Future 3D Wafer Bonding 2015 IEEE 65TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2015, : 348 - 353
- [48] 300-mm Wafer 3D Integration Technology using Hybrid Wafer Bonding 2013 8TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE (IMPACT), 2013, : 51 - 54
- [49] Impact of Radial Defect Clustering on 3D Stacked IC Yield from Wafer to Wafer Stacking PROCEEDINGS INTERNATIONAL TEST CONFERENCE 2012, 2012,
- [50] Die to Wafer Hybrid Cu Bonding for Fine Pitch 3D-IC Applications 2023 IEEE 73RD ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE, ECTC, 2023, : 1043 - 1047