Monte Carlo simulation of non-specular X-ray scattering profiles from multilayered structures

被引:2
|
作者
Gladyszewski, G
Bruynseraede, Y
机构
[1] Lab. V. Vaste-Stoffysika en Magnet., Katholieke Universiteit Leuven, B-3001 Leuven
关键词
computer simulation; multilayers; X-ray scattering; interfaces;
D O I
10.1016/0040-6090(95)07038-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A simple model for calculating non-specular X-ray scattering profiles from non-ideal multilayers is proposed. A Monte Carlo method is used to simulate a ''imperfect'' multilayer structure. Non-specular profiles are calculated using the kinematical theory of scattering. The influence of uncorrelated, laterally correlated, and vertically correlated interface roughness on omega-scans is studied.
引用
收藏
页码:184 / 187
页数:4
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