Monte-Carlo simulation of x-ray photoelectron emission from silver

被引:8
|
作者
Zhang, Z
Koshikawa, T
Iyasu, T
Shimizu, R
Goto, K
Tanaka, A
机构
[1] Osaka Inst Technol, Dept Informat Sci, Osaka 5730196, Japan
[2] Osaka Electrocommun Univ, Fundamental Elect Res Inst, Osaka 5728530, Japan
[3] Nagoya Inst Technol, Dept Syst Engn, Showa Ku, Nagoya, Aichi 4668555, Japan
[4] ULVAC PHI Inc, Kanagawa 2530084, Japan
关键词
effective energy-loss function; REELS analysis; Monte-Carlo simulation; XPS; x-ray photoelectron; silver; angular distribution; depth distribution function;
D O I
10.1002/sia.1609
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Silver 3d x-ray photoelectron spectroscopy (XPS) spectra were simulated with the Monte-Carlo method using an effective energy-loss function that was derived from a reflected electron energy-loss spectroscopy (REELS) analysis based on an extended Landau approach. After confirming that Monte-Carlo simulation based on the use of the effective energy-loss function can successfully describe the experimental REELS spectrum and Ag 3d XPS spectrum, we applied Monte-Carlo simulation to predict the angular distribution of Ag 3d x-ray photoelectrons for different x-ray incidence angles and different photoelectron take-off angles. The experimental photoelectron emission microscope that we are constructing was confirmed as being close to the optimum configuration, in which the x-ray incident angle as measured from the surface normal direction is 74degrees and the photoelectron take-off angle is set normal to the surface. The depth distribution functions of the Ag 3d X-ray photoelectrons for different energy windows suggest that the photoelectron emission microscope will exhibit greater surface sensitivity for narrower photoelectron energy windows. Copyright (C) 2003 John Wiley Sons, Ltd.
引用
收藏
页码:818 / 823
页数:6
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