Monte Carlo simulation of non-specular X-ray scattering profiles from multilayered structures

被引：2
|
作者：
Gladyszewski, G
Bruynseraede, Y
机构：
[1] Lab. V. Vaste-Stoffysika en Magnet., Katholieke Universiteit Leuven, B-3001 Leuven
来源：
THIN SOLID FILMS | 1996年 / 275卷 / 1-2期
关键词：
computer simulation; multilayers; X-ray scattering; interfaces;
D O I：
10.1016/0040-6090(95)07038-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A simple model for calculating non-specular X-ray scattering profiles from non-ideal multilayers is proposed. A Monte Carlo method is used to simulate a ''imperfect'' multilayer structure. Non-specular profiles are calculated using the kinematical theory of scattering. The influence of uncorrelated, laterally correlated, and vertically correlated interface roughness on omega-scans is studied.
引用
收藏
页码：184 / 187
页数：4
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