Anomalous dislocation annihilation behavior observed in a GaN crystal grown on point seeds by the Na-flux method

被引:13
|
作者
Imanishi, Masayuki [1 ]
Okumura, Kanako [1 ]
Nakamura, Kousuke [1 ]
Kitamura, Tomoko [1 ]
Kakinouchi, Keisuke [1 ]
Murakami, Kosuke [1 ]
Yoshimura, Masashi [2 ]
Fujita, Yu [3 ]
Tsusaka, Yoshiyuki [3 ]
Matsui, Junji [4 ]
Mori, Yusuke [1 ]
机构
[1] Osaka Univ, Div Elect Elect & Informat Engn, Suita, Osaka 5650871, Japan
[2] Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan
[3] Univ Hyogo, Grad Sch Mat Sci, 3-2-1 Kouto, Kamigori, Hyogo 6781297, Japan
[4] Univ Hyogo, Synchrotron Radiat Nanotechnol Ctr, 1-490-2,Kouto,Shingu Cho, Tatsuno, Hyogo 6795165, Japan
基金
日本科学技术振兴机构;
关键词
SINGLE-CRYSTALS; LASER-DIODES; REDUCTION; EPITAXY;
D O I
10.35848/1882-0786/aba58e
中图分类号
O59 [应用物理学];
学科分类号
摘要
We recently invented a method called the flux-film-coated technique for purifying a GaN wafer with low dislocation density grown from point-seed crystals. In this study, we investigated the mechanism behind the reduction of dislocation density in the GaN wafer by evaluating the three-dimensional behavior of dislocations using multiphoton-excitation photoluminescence images. We made the surprising discovery that dislocations more than 50 mu m away disappeared by annihilating each other as growth proceeded, and this is one of the mechanisms underlying the dislocation density reduction. The moving distance of dislocations before annihilation is uncommon and a unique phenomenon in the Na-flux method. (c) 2020 The Japan Society of Applied Physics
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页数:5
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