Growth of bulk GaN Crystal by Na Flux Method

被引:0
|
作者
Mori, Yusuke [1 ]
Imade, Mamoru [1 ]
Maruyama, Mihoko [1 ]
Yoshimura, Masashi [1 ]
机构
[1] Osaka Univ, Suita, Osaka 5650871, Japan
来源
关键词
GaN; Na flux method; dislocation-free; coalescence growth; SINGLE-CRYSTALS; AMMONOTHERMAL GAN; GALLIUM NITRIDE; VAPOR; MELT;
D O I
10.1117/12.2038281
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
With current technologies, dislocation-free bulk shape GaN crystals with centimeter-size can be grown from small seed crystals. This technique can be realized by putting a sapphire plate with a small hole (0.5 similar to 1.5 mm in diameter) on a GaN plate seed. Centimeter-sized bulk GaN single crystals with large dislocation-free areas could be fabricated by this technique. Cathodoluminescence measurement at the interface between the seed and the grown crystal has revealed that almost all dislocations propagated from the GaN seed were bent and terminated at the initial growth stage. To enlarge the diameter of bulk shape GaN crystals, we have developed the coalescence of GaN crystals from many isolated small seeds. As a first step, we grew two GaN point seeds and coalesced them. Two GaN point seeds were established by mounting a sapphire plate with two small holes. We have found the two GaN crystals grown from two separate seed area coalesced without generating dislocations at a coalescence boundary. The grown GaN crystal can remove from substrate easily during the growth. This phenomenon is effective to reduce the stress in the grown GaN crystal. 2-inch GaN crystals by the coalescence technique. Some of the crystals have very large curvature radius (similar to 100 m).
引用
收藏
页数:7
相关论文
共 50 条
  • [1] Growth of Bulk GaN crystal by Na flux method
    Imade, M.
    Miyoshi, N.
    Yoshimura, M.
    Kitaoka, Y.
    Sasaki, T.
    Mori, Y.
    GALLIUM NITRIDE MATERIALS AND DEVICES VI, 2011, 7939
  • [2] Growth of bulk GaN crystal by Na flux method under various conditions
    Mori, Y.
    Imade, M.
    Murakami, K.
    Takazawa, H.
    Imabayashi, H.
    Todoroki, Y.
    Kitamoto, K.
    Maruyama, M.
    Yoshimura, M.
    Kitaoka, Y.
    Sasaki, T.
    JOURNAL OF CRYSTAL GROWTH, 2012, 350 (01) : 72 - 74
  • [3] Growth of bulk GaN crystals by Na flux method
    Mori, Y.
    Kitaoka, Y.
    Imade, M.
    Miyoshi, N.
    Yoshimura, M.
    Sasaki, T.
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 8, NO 5, 2011, 8 (05): : 1445 - 1449
  • [4] The process of GaN single crystal growth by the Na flux method with Na vapor
    Yamada, T
    Yamane, H
    Iwata, H
    Sarayama, S
    JOURNAL OF CRYSTAL GROWTH, 2006, 286 (02) : 494 - 497
  • [5] Recent progress of Na-flux method for GaN crystal growth
    Mori, Yusuke
    Imanishi, Masayuki
    Murakami, Kosuke
    Yoshimura, Masashi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2019, 58
  • [6] Single crystal growth of GaN by the temperature gradient Na flux method
    Aoki, M
    Yamane, H
    Shimada, M
    Sarayama, S
    Iwata, H
    DiSalvo, FJ
    JOURNAL OF CRYSTAL GROWTH, 2004, 266 (04) : 461 - 466
  • [7] Effects of Cooling Process on GaN Crystal Growth by Na Flux Method
    Zhou, Mingbin
    Li, Zhenrong
    Fan, Shiji
    Xiong, Zhihua
    Luo, Gen
    JOURNAL OF ELECTRONIC MATERIALS, 2020, 49 (09) : 5260 - 5265
  • [8] Effects of Cooling Process on GaN Crystal Growth by Na Flux Method
    Mingbin Zhou
    Zhenrong Li
    Shiji Fan
    Zhihua Xiong
    Gen Luo
    Journal of Electronic Materials, 2020, 49 : 5260 - 5265
  • [9] Influence of pressure control on the growth of bulk GaN single crystal using a Na flux
    Onda, M
    Iwahashi, T
    Okamoto, M
    Yap, YK
    Yoshimura, M
    Mori, Y
    Sasaki, T
    JOURNAL OF CRYSTAL GROWTH, 2002, 237 : 2112 - 2115
  • [10] LPE Growth of Bulk GaN crystal by alkali-metal flux method
    Kawamura, Fumio
    Umeda, Hidekazu
    Morishita, Masanori
    Gejo, Ryohei
    Tanpo, Masaki
    Imade, Mamoru
    Miyoshi, Naoya
    Yoshimura, Masashi
    Mori, Yusuke
    Sasaki, Takatomo
    Kitaoka, Yasuo
    SILICON CARBIDE AND RELATED MATERIALS 2007, PTS 1 AND 2, 2009, 600-603 : 1245 - +