Growth of bulk GaN Crystal by Na Flux Method

被引:0
|
作者
Mori, Yusuke [1 ]
Imade, Mamoru [1 ]
Maruyama, Mihoko [1 ]
Yoshimura, Masashi [1 ]
机构
[1] Osaka Univ, Suita, Osaka 5650871, Japan
来源
关键词
GaN; Na flux method; dislocation-free; coalescence growth; SINGLE-CRYSTALS; AMMONOTHERMAL GAN; GALLIUM NITRIDE; VAPOR; MELT;
D O I
10.1117/12.2038281
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
With current technologies, dislocation-free bulk shape GaN crystals with centimeter-size can be grown from small seed crystals. This technique can be realized by putting a sapphire plate with a small hole (0.5 similar to 1.5 mm in diameter) on a GaN plate seed. Centimeter-sized bulk GaN single crystals with large dislocation-free areas could be fabricated by this technique. Cathodoluminescence measurement at the interface between the seed and the grown crystal has revealed that almost all dislocations propagated from the GaN seed were bent and terminated at the initial growth stage. To enlarge the diameter of bulk shape GaN crystals, we have developed the coalescence of GaN crystals from many isolated small seeds. As a first step, we grew two GaN point seeds and coalesced them. Two GaN point seeds were established by mounting a sapphire plate with two small holes. We have found the two GaN crystals grown from two separate seed area coalesced without generating dislocations at a coalescence boundary. The grown GaN crystal can remove from substrate easily during the growth. This phenomenon is effective to reduce the stress in the grown GaN crystal. 2-inch GaN crystals by the coalescence technique. Some of the crystals have very large curvature radius (similar to 100 m).
引用
收藏
页数:7
相关论文
共 50 条
  • [41] Reducing GaN crystal dislocations through lateral growth on uneven seed crystal surfaces using the Na-flux method
    Washida, Shogo
    Imanishi, Masayuki
    Tandryo, Ricksen
    Hamada, Kazuma
    Murakami, Kosuke
    Usami, Shigeyoshi
    Maruyama, Mihoko
    Yoshimura, Masashi
    Mori, Yusuke
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2023, 62 (10)
  • [42] Raman scattering behaviors of GaN single crystal grown by a Na flux method
    Park, Sang Eon
    Cho, Chae-Ryong
    Cho, Yong Chan
    Jeong, Se-Young
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2004, 43 (03): : 894 - 896
  • [43] Control of GaN crystal habit by solution stirring in the Na-flux method
    Murakami, Kosuke
    Imade, Mamoru
    Imanishi, Masayuki
    Honjo, Masatomo
    Imabayashi, Hiroki
    Matsuo, Daisuke
    Nakamura, Kosuke
    Maruyama, Mihoko
    Yoshimura, Masashi
    Mori, Yusuke
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2017, 56 (01)
  • [44] Raman scattering behaviors of GaN single crystal grown by a Na flux method
    Park, SE
    Cho, CR
    Cho, YC
    Jeong, SY
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (03): : 894 - 896
  • [45] Mechanism for enhanced single-crystal GaN growth in the C-assisted Na-flux method
    Kawamura, Takahiro
    Imabayashi, Hiroki
    Maruyama, Mihoko
    Imade, Mamoru
    Yoshimura, Masashi
    Mori, Yusuke
    Morikawa, Yoshitada
    APPLIED PHYSICS EXPRESS, 2016, 9 (01)
  • [46] Influence of 3d-transition-metal additives on single crystal growth of GaN by the Na flux method
    Aoki, M
    Yamane, H
    Shimada, M
    Sarayama, S
    Iwata, H
    Disalvo, FJ
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (9A): : 5445 - 5449
  • [47] Influence of 3d-transition-metal additives on single crystal growth of GaN by the Na flux method
    Yamane, H. (yamane@tagen.tohoku.ac.jp), 1600, Japan Society of Applied Physics (42):
  • [48] Bulk GaN single crystal growth and characterization using various alkali metal flux
    Shin, T. I.
    Lee, H. J.
    Lee, J. H.
    Kim, S. -W.
    Suh, S. J.
    Yoon, D. H.
    JOURNAL OF CRYSTAL GROWTH, 2006, 292 (02) : 216 - 220
  • [49] Effect of flux composition ratio on the coalescence growth of GaN crystals by the Na-flux method
    Honjo, Masatomo
    Imanishi, Masayuki
    Imabayashi, Hiroki
    Nakamura, Kosuke
    Murakami, Kosuke
    Matsuo, Daisuke
    Maruyama, Mihoko
    Imade, Mamoru
    Yoshimura, Masashi
    Mori, Yusuke
    OPTICAL MATERIALS, 2017, 65 : 38 - 41
  • [50] Bulk GaN crystal growth by the high-pressure ammonothermal method
    D'Evelyn, M. P.
    Hong, H. C.
    Park, D. -S.
    Lu, H.
    Kaminsky, E.
    Melkote, R. R.
    Perlin, P.
    Lesczynski, M.
    Porowski, S.
    Molnar, R. J.
    JOURNAL OF CRYSTAL GROWTH, 2007, 300 (01) : 11 - 16