Anomalous dislocation annihilation behavior observed in a GaN crystal grown on point seeds by the Na-flux method

被引:13
|
作者
Imanishi, Masayuki [1 ]
Okumura, Kanako [1 ]
Nakamura, Kousuke [1 ]
Kitamura, Tomoko [1 ]
Kakinouchi, Keisuke [1 ]
Murakami, Kosuke [1 ]
Yoshimura, Masashi [2 ]
Fujita, Yu [3 ]
Tsusaka, Yoshiyuki [3 ]
Matsui, Junji [4 ]
Mori, Yusuke [1 ]
机构
[1] Osaka Univ, Div Elect Elect & Informat Engn, Suita, Osaka 5650871, Japan
[2] Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan
[3] Univ Hyogo, Grad Sch Mat Sci, 3-2-1 Kouto, Kamigori, Hyogo 6781297, Japan
[4] Univ Hyogo, Synchrotron Radiat Nanotechnol Ctr, 1-490-2,Kouto,Shingu Cho, Tatsuno, Hyogo 6795165, Japan
基金
日本科学技术振兴机构;
关键词
SINGLE-CRYSTALS; LASER-DIODES; REDUCTION; EPITAXY;
D O I
10.35848/1882-0786/aba58e
中图分类号
O59 [应用物理学];
学科分类号
摘要
We recently invented a method called the flux-film-coated technique for purifying a GaN wafer with low dislocation density grown from point-seed crystals. In this study, we investigated the mechanism behind the reduction of dislocation density in the GaN wafer by evaluating the three-dimensional behavior of dislocations using multiphoton-excitation photoluminescence images. We made the surprising discovery that dislocations more than 50 mu m away disappeared by annihilating each other as growth proceeded, and this is one of the mechanisms underlying the dislocation density reduction. The moving distance of dislocations before annihilation is uncommon and a unique phenomenon in the Na-flux method. (c) 2020 The Japan Society of Applied Physics
引用
收藏
页数:5
相关论文
共 50 条
  • [31] Dramatic reduction of dislocations on a GaN point seed crystal by coalescence of bunched steps during Na-flux growth
    Imanishi, Masayuki
    Todoroki, Yuma
    Murakami, Kosuke
    Matsuo, Daisuke
    Imabayashi, Hiroki
    Takazawa, Hideo
    Maruyama, Mihoko
    Imade, Mamoru
    Yoshimura, Masashi
    Mori, Yusuke
    JOURNAL OF CRYSTAL GROWTH, 2015, 427 : 87 - 93
  • [32] Effect of flux composition ratio on the coalescence growth of GaN crystals by the Na-flux method
    Honjo, Masatomo
    Imanishi, Masayuki
    Imabayashi, Hiroki
    Nakamura, Kosuke
    Murakami, Kosuke
    Matsuo, Daisuke
    Maruyama, Mihoko
    Imade, Mamoru
    Yoshimura, Masashi
    Mori, Yusuke
    OPTICAL MATERIALS, 2017, 65 : 38 - 41
  • [33] Reducing GaN crystal dislocations through lateral growth on uneven seed crystal surfaces using the Na-flux method
    Washida, Shogo
    Imanishi, Masayuki
    Tandryo, Ricksen
    Hamada, Kazuma
    Murakami, Kosuke
    Usami, Shigeyoshi
    Maruyama, Mihoko
    Yoshimura, Masashi
    Mori, Yusuke
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2023, 62 (10)
  • [34] Local current leakage at threading dislocations in GaN bulk single crystals grown by a modified Na-flux method
    Hamachi, Takeaki
    Tohei, Tetsuya
    Imanishi, Masayuki
    Mori, Yusuke
    Sakai, Akira
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2019, 58 (05)
  • [35] Growth behavior and stress distribution of bulk GaN grown by Na-flux with HVPE GaN seed under near-thermodynamic equilibrium
    Si, Zhiwei
    Liu, Zongliang
    Hu, Yaoqiao
    Zheng, Shunan
    Dong, Xiaoming
    Gao, Xiaodong
    Wang, Jianfeng
    Xu, Ke
    APPLIED SURFACE SCIENCE, 2022, 578
  • [36] Studying the effect of temperature and pressure on GaN crystals via the Na-flux method
    Wang, Benfa
    Liu, Lei
    Tian, Ge
    Wang, Guodong
    Yu, Jiaoxian
    Li, Qiubo
    Sun, Defu
    Xu, Xiangang
    Zhang, Lei
    Wang, Shouzhi
    CRYSTENGCOMM, 2024, 26 (24) : 3176 - 3184
  • [37] Raman scattering behaviors of GaN single crystal grown by a Na flux method
    Park, Sang Eon
    Cho, Chae-Ryong
    Cho, Yong Chan
    Jeong, Se-Young
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2004, 43 (03): : 894 - 896
  • [38] Raman scattering behaviors of GaN single crystal grown by a Na flux method
    Park, SE
    Cho, CR
    Cho, YC
    Jeong, SY
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (03): : 894 - 896
  • [39] Numerical Simulation of Temperature Field Optimization to Enhance Nitrogen Transfer in GaN Crystal Growth by the Na-Flux Method
    Wu, Wenxiao
    Huang, Gemeng
    Pan, Ronglin
    Zhou, Mingbin
    Xiong, Zhihua
    ACS OMEGA, 2023, 8 (26): : 24106 - 24112
  • [40] Growth and Evaluation of Bulk GaN Crystals Grown on a Point Seed Crystal by Ba-Added Na Flux Method
    Imabayashi, Hiroki
    Murakami, Kosuke
    Matsuo, Daisuke
    Todoroki, Yuma
    Takazawa, Hideo
    Kitamoto, Akira
    Maruyama, Mihoko
    Imade, Mamoru
    Yoshimura, Masashi
    Mori, Yusuke
    SENSORS AND MATERIALS, 2013, 25 (03) : 165 - 176