Effects of Solution Height on the Growth of GaN Crystals in the Na-Flux Liquid-Phase Method
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作者:
Huang, Gemeng
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Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Huang, Gemeng
[1
,2
]
Feng, Maorong
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Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Feng, Maorong
[1
,2
]
Yang, Chen
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Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Yang, Chen
[1
,2
]
Ma, Ming
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Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Ma, Ming
[1
,2
]
Xia, Song
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Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xia, Song
[1
,2
]
Fan, Shiji
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Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Fan, Shiji
[1
,2
]
Li, Zhenrong
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Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Li, Zhenrong
[1
,2
]
机构:
[1] Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
[2] Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R China
The effects of solution height on the growth of GaN crystals in the liquid-phase epitaxial growth (LPE) of Na-Li-Ca flux were investigated by using a combination of experimental and numerical calculations. Vertically placed hydride vapor phase epitaxial (HVPE) GaN crystals were used as seeds in the experiments. Two different solution heights were employed: 13.2 mm (H-13.2 mm) and 26.8 mm (H-26.8 mm). The distribution of the nitrogen concentration and supersaturation of GaN in both solutions were simulated and calculated through COMSOL Multiphysics field simulation. The experimental results show that the LPE thickness of GaN crystals grown in both solutions shows a top-down decreasing trend; however, there is a significant decrease in the LPE thickness range of about 375-159 mu m in the H-13.2 mm solution and an insignificant decline in the thickness range of approximately 101-55 mu m in the H-26.8 mm solution. The trend in the thickness of as-grown crystals is highly consistent with the calculated trends of nitrogen concentration and GaN supersaturation in the solution. In the H-26.8 mm solution, the fluid appears to be stratified, which inhibits nitrogen transport downward from the gas-liquid interface. When crystal growth in both solutions lies in the epitaxial growth of the substable zone, the nitrogen concentration and GaN supersaturation in the H-26.8 mm solution near the bottom of the crucible are reduced compared to the H-13.2 mm solution height, resulting in a lower growth rate with the near-equilibrium growth mode. This is consistent with XRC measurements showing a higher crystalline quality in the H-26.8 mm solution. Controlling the height of the growth solution may offer a new idea to growing high-quality GaN crystals with flatter surfaces, better crystalline quality, and improved homogeneity closer to near-equilibrium growth in the Na-flux liquid-phase epitaxial method.
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Xi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R China
Huang, Gemeng
Hao, Hangfei
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Xi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R China
Hao, Hangfei
Yang, Chen
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h-index: 0
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Xi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R China
Yang, Chen
Ma, Ming
论文数: 0引用数: 0
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Xi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R China
Ma, Ming
Xia, Song
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Xi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R China
Xia, Song
Fan, Shiji
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Xi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R China
Fan, Shiji
Li, Zhenrong
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h-index: 0
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Xi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Elect Mat Res Lab, Minist Educ, Key Lab, Xian 710049, Peoples R China
机构:
Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Yang, Chen
Huang, Gemeng
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Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Huang, Gemeng
Yan, Hao
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Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Yan, Hao
Wang, Ziyou
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Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Wang, Ziyou
Ma, Ming
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h-index: 0
机构:
Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Ma, Ming
Xia, Song
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Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xia, Song
Zhou, Mingbin
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Jiangxi Sci & Technol Normal Univ, Key Lab Optoelect & Commun Jiangxi Prov, Nanchang 330038, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Zhou, Mingbin
Fan, Shiji
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机构:
Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Fan, Shiji
Li, Zhenrong
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机构:
Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect & Informat Engn, Xian 710049, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Elect Mat Res Lab, Key Lab,Minist Educ, Xian 710049, Peoples R China
机构:Xi’an Jiaotong University,Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education and International Center for Dielectric Research, School of Electronic and Information Engineering
Hangfei Hao
Xi Wu
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机构:Xi’an Jiaotong University,Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education and International Center for Dielectric Research, School of Electronic and Information Engineering
Xi Wu
Zhenrong Li
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机构:Xi’an Jiaotong University,Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education and International Center for Dielectric Research, School of Electronic and Information Engineering
Zhenrong Li
Shiji Fan
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机构:Xi’an Jiaotong University,Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education and International Center for Dielectric Research, School of Electronic and Information Engineering
Shiji Fan
Journal of Electronic Materials,
2019,
48
: 3570
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3578
机构:
Xi An Jiao Tong Univ, Minist Educ, Elect Mat Res Lab, Key Lab, Xian 710049, Shaanxi, Peoples R China
Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Int Ctr Dielect Res, Xian 710049, Shaanxi, Peoples R ChinaXi An Jiao Tong Univ, Minist Educ, Elect Mat Res Lab, Key Lab, Xian 710049, Shaanxi, Peoples R China
Hao, Hangfei
Wu, Xi
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Xi An Jiao Tong Univ, Minist Educ, Elect Mat Res Lab, Key Lab, Xian 710049, Shaanxi, Peoples R China
Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Int Ctr Dielect Res, Xian 710049, Shaanxi, Peoples R ChinaXi An Jiao Tong Univ, Minist Educ, Elect Mat Res Lab, Key Lab, Xian 710049, Shaanxi, Peoples R China
Wu, Xi
Li, Zhenrong
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Xi An Jiao Tong Univ, Minist Educ, Elect Mat Res Lab, Key Lab, Xian 710049, Shaanxi, Peoples R China
Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Int Ctr Dielect Res, Xian 710049, Shaanxi, Peoples R ChinaXi An Jiao Tong Univ, Minist Educ, Elect Mat Res Lab, Key Lab, Xian 710049, Shaanxi, Peoples R China
Li, Zhenrong
Fan, Shiji
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机构:
Xi An Jiao Tong Univ, Minist Educ, Elect Mat Res Lab, Key Lab, Xian 710049, Shaanxi, Peoples R China
Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Int Ctr Dielect Res, Xian 710049, Shaanxi, Peoples R ChinaXi An Jiao Tong Univ, Minist Educ, Elect Mat Res Lab, Key Lab, Xian 710049, Shaanxi, Peoples R China