Coalescence Growth of Dislocation-Free GaN Crystals by the Na-Flux Method

被引:31
|
作者
Imanishi, Masayuki [1 ]
Murakami, Kosuke [1 ]
Imabayashi, Hiroki [1 ]
Takazawa, Hideo [1 ]
Todoroki, Yuma [1 ]
Matsuo, Daisuke [1 ]
Maruyama, Mihoko [1 ]
Imade, Mamoru [1 ]
Yoshimura, Masashi [1 ]
Mori, Yusuke [1 ]
机构
[1] Osaka Univ, Dept Elect Elect & Informat Engn, Suita, Osaka 5650871, Japan
基金
日本科学技术振兴机构;
关键词
SINGLE-CRYSTALS; AMMONOTHERMAL GAN; GALLIUM NITRIDE; PHASE EPITAXY; DENSITY;
D O I
10.1143/APEX.5.095501
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have recently shown that dislocation-free GaN crystals could be grown on a GaN point seed by the Na-flux method. To enlarge the diameter of dislocation-free GaN crystals, we propose here the coalescence of GaN crystals grown from many isolated point seeds. In this study, we found that two GaN crystals grown from two point seeds arranged along the a-direction coalesced without generating dislocations at the coalescence boundary, and the c-axis misorientation between two crystals around the coalescence boundary gradually diminished as the growth proceeded. These results indicate that coalescence growth may become a key technique for fabricating large-diameter dislocation-free GaN crystals. (C) 2012 The Japan Society of Applied Physics
引用
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页数:3
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