Fabrication of Three-Dimensional Metalized Movable Microstructures by the Combination of Two-Photon Microfabrication and Electroless Plating

被引：13
|
作者：
Ikegami, Takashi [1 ]
Stocker, Michael P. [2 ]
Monaco, Kathleen [2 ]
Fourkas, John T. [2 ]
Maruo, Shoji [1 ]
机构：
[1] Yokohama Natl Univ, Dept Mech Engn, Yokohama, Kanagawa 2408501, Japan
[2] Univ Maryland, Dept Chem & Biochem, College Pk, MD 20742 USA
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2012年 / 51卷 / 06期
基金：
日本学术振兴会;
关键词：
POLYMER MICROSTRUCTURES; DRIVEN; MICROMACHINES; NANOSTRUCTURES; MANIPULATION; ABSORPTION; RESOLUTION; PARTICLES; SCAFFOLDS; PHOTONICS;
D O I：
10.1143/JJAP.51.06FL17
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We propose a method to fabricate three-dimensional (3D) metallic movable microparts by the combination of two-photon microfabrication and electroless plating. In this method, polymeric movable microparts with anchors made by two-photon microfabrication are metalized by electroless plating, and then the anchors are removed by laser ablation using a femtosecond pulsed laser. As a result, a metalized freely movable micropart whose motion is restricted to a shaft can be produced. We succeeded in fabricating sophisticated 3D metallic microrotors by adjusting the experimental conditions of both electroless copper plating and laser ablation. (C) 2012 The Japan Society of Applied Physics
引用
收藏
页数：4
相关论文
共 50 条
  • [1] Fabrication of freely movable microstructures by using two-photon three-dimensional microfabrication
    Maruo, S
    Ikuta, K
    [J]. MICRO- AND NANO-PHOTONIC MATERIALS AND DEVICES, 2000, 3937 : 106 - 112
  • [2] Production of metalized micromachines by the combination of femtosecond-laser three-dimensional microfabrication and electroless plating
    Maruo, Shoji
    [J]. Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 2015, 81 (08): : 714 - 717
  • [3] Three-Dimensional Microfabrication by Two-Photon Lithography
    Da Yang
    Shalin J. Jhaveri
    Christopher K. Ober
    [J]. MRS Bulletin, 2005, 30 : 976 - 982
  • [4] Three-dimensional microfabrication by two-photon lithography
    Yang, D
    Jhaveri, SJ
    Ober, CK
    [J]. MRS BULLETIN, 2005, 30 (12) : 976 - 982
  • [5] Formation of three-dimensional carbon microstructures via two-photon microfabrication and microtransfer molding
    Daicho, Yuya
    Murakami, Terumasa
    Hagiwara, Tsuneo
    Maruo, Shoji
    [J]. OPTICAL MATERIALS EXPRESS, 2013, 3 (06): : 875 - 883
  • [6] Fabrication of three-dimensional periodic microstructures by means of two-photon polymerization
    Borisov, RA
    Dorojkina, GN
    Koroteev, NI
    Kozenkov, VM
    Magnitskii, SA
    Malakhov, DV
    Tarasishin, AV
    Zheltikov, AM
    [J]. APPLIED PHYSICS B-LASERS AND OPTICS, 1998, 67 (06): : 765 - 767
  • [7] Fabrication of three-dimensional periodic microstructures by means of two-photon polymerization
    R.A. Borisov
    G.N. Dorojkina
    N.I. Koroteev
    V.M. Kozenkov
    S.A. Magnitskii
    D.V. Malakhov
    A.V. Tarasishin
    A.M. Zheltikov
    [J]. Applied Physics B, 1998, 67 : 765 - 767
  • [8] Three-dimensional microfabrication with two-photon absorbed photopolymerization
    Maruo, S
    Nakamura, O
    Kawata, S
    [J]. 17TH CONGRESS OF THE INTERNATIONAL COMMISSION FOR OPTICS: OPTICS FOR SCIENCE AND NEW TECHNOLOGY, PTS 1 AND 2, 1996, 2778 : 165 - 166
  • [9] Three-dimensional microfabrication using two-photon polymerization
    Cumpston, BH
    Ehrlich, JE
    Kuebler, SM
    Lipson, M
    Marder, SR
    McCord-Maughon, D
    Perry, JW
    Rockel, H
    Rumi, M
    [J]. MATERIALS AND DEVICE CHARACTERIZATION IN MICROMACHINING, 1998, 3512 : 168 - 168
  • [10] Two-photon fabrication of three-dimensional microstructures using a femtosecond laser.
    Kawata, S
    Tanaka, T
    [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2000, 220 : U336 - U336
12345