Fabrication of Three-Dimensional Metalized Movable Microstructures by the Combination of Two-Photon Microfabrication and Electroless Plating

被引：13

作者：

Ikegami, Takashi ^{[1
]}

Stocker, Michael P. ^{[2
]}

Monaco, Kathleen ^{[2
]}

Fourkas, John T. ^{[2
]}

Maruo, Shoji ^{[1
]}

机构：

[1] Yokohama Natl Univ, Dept Mech Engn, Yokohama, Kanagawa 2408501, Japan

[2] Univ Maryland, Dept Chem & Biochem, College Pk, MD 20742 USA

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2012年 / 51卷 / 06期

基金：

日本学术振兴会;

关键词：

POLYMER MICROSTRUCTURES; DRIVEN; MICROMACHINES; NANOSTRUCTURES; MANIPULATION; ABSORPTION; RESOLUTION; PARTICLES; SCAFFOLDS; PHOTONICS;

D O I：

10.1143/JJAP.51.06FL17

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We propose a method to fabricate three-dimensional (3D) metallic movable microparts by the combination of two-photon microfabrication and electroless plating. In this method, polymeric movable microparts with anchors made by two-photon microfabrication are metalized by electroless plating, and then the anchors are removed by laser ablation using a femtosecond pulsed laser. As a result, a metalized freely movable micropart whose motion is restricted to a shaft can be produced. We succeeded in fabricating sophisticated 3D metallic microrotors by adjusting the experimental conditions of both electroless copper plating and laser ablation. (C) 2012 The Japan Society of Applied Physics

引用

页数：4

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