Production of metalized micromachines by the combination of femtosecond-laser three-dimensional microfabrication and electroless plating

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作者：
Maruo, Shoji
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Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2015年 / 81卷 / 08期
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10.2493/jjspe.81.714
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页码：714 / 717
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