Formation of three-dimensional carbon microstructures via two-photon microfabrication and microtransfer molding

被引：24

作者：

Daicho, Yuya ^{[1
,2
]}

Murakami, Terumasa ^{[1
]}

Hagiwara, Tsuneo ^{[3
]}

Maruo, Shoji ^{[1
]}

机构：

[1] Yokohama Natl Univ, Dept Mech Engn, Grad Sch Engn, Hodogaya Ku, Yokohama, Kanagawa 2408501, Japan

[2] C MET Inc, Kohoku Ku, Yokohama, Kanagawa 2220033, Japan

[3] Tokyo Inst Technol, Grad Sch Sci & Engn, Dept Organ & Polymer Mat, Meguro Ku, Tokyo 1528550, Japan

来源：

OPTICAL MATERIALS EXPRESS | 2013年 / 3卷 / 06期

关键词：

MICROELECTROMECHANICAL SYSTEMS; AMORPHOUS-CARBON; FABRICATION; PHOTORESIST; MEMS; DIAMOND; FILMS;

D O I：

10.1364/OME.3.000875

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We developed new photopolymers for use in the formation of three-dimensional (3-D) carbon microstructures via two-photon microfabrication and microtransfer molding. The photopolymers contain the epoxy resorcinol diglycidyl ether. They have a high carbon content and a high bond energy, ensuring structural fidelity of the microstructures after pyrolysis. A cationic photoinitiator is incorporated into one of the new photopolymers and an additional radical photoinitiator into another. These two photopolymers are found to be ideal for two-photon microfabrication and microtransfer molding, respectively, with complex 3-D carbon microstructures such as a bunny and pyramidal models being formed. Potential applications of the new photopolymers include 3-D carbon electrodes for fuel cells or batteries and interfaces for biosensors. (C) 2013 Optical Society of America

引用

页码：875 / 883

页数：9

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