Nitrogen stability measurements in sputtered iron nitride thin films by thermal desorption spectrometry

被引:14
|
作者
Chatbi, H
Vergnat, M
Bobo, JF
Hennet, L
机构
[1] Lab. Metall. Phys. et Sci. des Mat., U.R.A. au C.N.R.S. no 155, Univ. Henri Ponicare Nancy 1, 54506 Vanduvre-les-Nancy Cedex
关键词
magnetic films and multilayers; phase transitions;
D O I
10.1016/S0038-1098(97)00066-5
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Different phases of iron nitrides were prepared by reactive sputtering. The release of nitrogen and the crystallographic transformations during annealing were monitored by thermal desorption spectrometry and X-ray diffraction experiments. Finally, the diffusivity of nitrogen in the gamma'-Fe4N phase was evaluated. (C) 1997 Elsevier Science Ltd.
引用
收藏
页码:677 / 679
页数:3
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