Mechanical properties of sputtered silicon nitride thin films

被引：0
|
作者：
Vila, M. [1 ]
Cáceres, D. [2 ]
Prieto, C. [1 ]
机构：
[1] Inst. de Cie. de Mat. de Madrid, Consejo Sup. de Invest. Cie., Cantoblanco, 28049-Madrid, Spain
[2] Departamento Física, Escuela Politécnica Superior, Universidad Carlos III de Madrid, Avda. Universidad, 30, 28911-Leganés, Spain
来源：
Journal of Applied Physics | 2003年 / 94卷 / 12期
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页码：7868 / 7873
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