Simulation Research on Workshop Control Strategy in Semiconductor Wafer Probe Area

In view of semiconductor wafer probe area's workshop management and control problem, with the thought of object-oriented, a behavior model of probing workshop is set up in terms of the figuration of UML. Paper puts forward an integrated workshop control strategy considered three factors; wafer releasing speed, dispatching rule and buffer capacity. It uses the SimTalk brought by EM-plant to transform behavior model directly into simulation model. By analyzing the experimental result of simulation model, the influence of the wafer releasing speed, machine dispatching and buffer capacity upon probe performance indicators such as month output, production cycle and quantity of work in process are got. It supplies the decision maker with evidence.