Modeling and Simulation of Negative Capacitance Gate on Ge FETs

被引:5
|
作者
Liao, Yu-Hung [1 ]
Fan, Sheng-Ting [2 ]
Liu, C. W. [1 ,2 ]
机构
[1] Natl Taiwan Univ, Dept Elect Engn, Taipei 106, Taiwan
[2] Natl Taiwan Univ, Grad Inst Elect Engn, Taipei 106, Taiwan
关键词
D O I
10.1149/07508.0461ecst
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
In this work, a polysilicon-ferroelectric gate capacitor is proposed to be stacked on the Ge-MOSFET to simultaneously maintain the stability and the potential amplification in the sub-threshold region of a Negative Capacitance Field Effect Transistor. Hence, the non-hysteresis ID-VG characteristics with sub-60mV/dec subthreshold slope can be designed. A simple capacitance model including the effects of gate-to-source/drain overlap, interface trap states at oxide/Ge, and polysilicon/FE/metal is presented to analyze the subthreshold behavior. The optimized SS is further improved when the direct S/D overlap with floating metal of Ge-MOSFET increases. The polysilicon doping concentration causes the trade-off between subthreshold swing and hysteresis-free maximum voltage. The impact of the interface traps at the FE/poly interface on the device performance and the optimization approach are also discussed.
引用
收藏
页码:461 / 467
页数:7
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