Micro tri-axial force sensor for 3D bio-micromanipulation

被引:0
|
作者
Arai, F [1 ]
Sugiyama, T [1 ]
Fukuda, T [1 ]
Iwata, H [1 ]
Itoigawa, K [1 ]
机构
[1] Nagoya Univ, Dept Micro Syst Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
关键词
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
It is important to manipulate a biological small object, Such as a cell and embryo. Three-dimensional high speed micromanipulation is needed as a fundamental technology for biology and bio engineering application. In this paper, we focus on the contact type micromanipulation in the liquid. We designed and made a contact type micromanipulation system which has a 3DOF narrow range positioning system on a 3 DOF wide range positioning system. We developed a micro tri-axial force sensor which can be installed near the tip of the endeffector. Performance of this micro force sensor is presented.
引用
收藏
页码:2744 / 2749
页数:6
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