Investigation of the Discharge Chamber Expansion Region Influence on the Electron Density in an Inductively Coupled RF Discharge

被引：0
|
作者：
Shemakhin, A. Y. [1 ]
Zheltukhin, V. S. [1 ]
Kiselev, G. B. [1 ]
Terentev, T. N. [1 ]
机构：
[1] Kazan Fed Univ, Kazan 420008, Russia
来源：
HIGH ENERGY CHEMISTRY | 2023年 / 57卷 / SUPPL 1期
基金：
俄罗斯科学基金会;
关键词：
inductively-coupled plasma simulation; radio-frequency discharge; COMSOL multiphysics; GLOW-DISCHARGE; PLASMA; DYNAMICS;
D O I：
10.1134/S0018143923070445
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In this paper we developed a model of the ICRF plasma flow in a geometry of the two following regions: a plasma torch (narrow area) and a chamber (broad area). We used the numerical model developed in the COMSOL-multiphysics software with the given parameters of outlet pressure p = 133 Pa, drive power W = 1.3 kW, drive frequency f = 1.76 MHz and gas flow G = 0-0.4 g/s. We obtained the spatial dependencies of the electron density, electron temperature, pressure in the chamber, gas velocity and performed the analysis of effects in the broadening area. As a result, we noticed some features, which include an anomalous increase of the electron density in the broadening area.
引用
收藏
页码：S227 / S233
页数：7
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