Spectral diagnostics of inductively coupled RF discharge plasma

被引：0
|
作者：
I. Sh. Abdullin
A. N. Bykanov
I. G. Gafarov
O. E. Ibragimov
R. F. Sharafeev
机构：
[1] Kazan National Research Technological University,
[2] The Innovative Technopark “Idea”,undefined
来源：
High Energy Chemistry | 2012年 / 46卷
关键词：
Inductively Couple Plasma; High Energy Chemistry; Rotational Temperature; Molecular Band; Negative System;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Results of UV spectral measurements in low-pressure (30–65 Pa) and atmospheric-pressure inductively coupled radiofrequency discharges at different power inputs and gas compositions typical for that of industrial processing regimes are reported. Isolated molecular bands have been observed in the spectra; by analyzing the unresolved rotational temperature of these bands, the rotational temperature of the upper emission state can be found.
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页码：271 / 275
页数：4
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