Investigation of the Discharge Chamber Expansion Region Influence on the Electron Density in an Inductively Coupled RF Discharge

In this paper we developed a model of the ICRF plasma flow in a geometry of the two following regions: a plasma torch (narrow area) and a chamber (broad area). We used the numerical model developed in the COMSOL-multiphysics software with the given parameters of outlet pressure p = 133 Pa, drive power W = 1.3 kW, drive frequency f = 1.76 MHz and gas flow G = 0-0.4 g/s. We obtained the spatial dependencies of the electron density, electron temperature, pressure in the chamber, gas velocity and performed the analysis of effects in the broadening area. As a result, we noticed some features, which include an anomalous increase of the electron density in the broadening area.