COLLISIONLESS ELECTRON HEATING IN AN INDUCTIVELY-COUPLED DISCHARGE

被引：217
|
作者：
TURNER, MM
机构：
[1] School of Physical Sciences, Dublin City University, Glasnevin
来源：
PHYSICAL REVIEW LETTERS | 1993年 / 71卷 / 12期
关键词：
D O I：
10.1103/PhysRevLett.71.1844
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
We present self-consistent simulations and analysis of the electron heating processes in an inductively coupled discharge. The results show that collisionless electron heating is predominant at pressures of 10 mTorr or less. The collisionless excitation mechanism is a warm plasma effect, analogous to the anomalous skin effect in metals.
引用
收藏
页码：1844 / 1847
页数：4
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