Effect of pressure on plasma-assisted chemical vapor deposition of silicon oxide(s)

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作者：
Banerjee, Aditi [1 ]
DebRoy, Tarasankar [1 ]
机构：
[1] Pennsylvania State Univ, University Park, United States
来源：
Journal of the American Ceramic Society | 1994年 / 77卷 / 05期
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页码：1366 / 1368
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