Synthesis of carbon nanotubes by ECR plasma-assisted chemical vapor deposition

被引：0
|
作者：
S.K. Patra
G. Mohan Rao
机构：
[1] Department of Instrumentation,Indian Institute of Science
来源：
Applied Physics A | 2005年 / 80卷
关键词：
Carbon Nanotubes; Electron Cyclotron Resonance; Plasma Chemical Vapor Deposition; Electron Cyclotron Resonance Plasma; Grow Carbon Nanotubes;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Carbon nanotubes have been grown using an electron cyclotron resonance (ECR) plasma source at a substrate temperature of 500 °C. Methane has been used as the source gas. A network of carbon nanotubes has been observed in scanning electron microscopy. Transmission electron microscopy revealed that the structure consists of straight, Y-junction and ring-like nanotubes. Further, electron diffraction of the nanotubes confirms a graphite crystal structure.
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页码：1113 / 1115
页数：2
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